Average obligated amount per year since period start.
Portion of total contract value already obligated.
Share of total value represented by subawards.
AQUEOUS DEVELOPER MODULE IN SUSS ACS200 MICROLITHOGRAPHY CLUSTER UPGRADES
Task order obligations
Estimated months remaining until end of performance.
Period of performance
100% of period elapsed
Awarding Agency
NINATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
Code: 1341
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Modification ID | Description | Action Date | Obligated Amount | Action Type |
|---|---|---|---|---|
Subaward # | Subawardee | Description | Amount | Action Date |
|---|---|---|---|---|