Average obligated amount per year since period start.
Portion of total contract value already obligated.
Share of total value represented by subawards.
ELECTRON BEAM LITHOGRAPHER (EBL), USED TO DEFINE NANO-SIZED GEOMETRIC STRUCTURES NEEDED IN THE FABRICATION OF ADVANCED SENSORS, DETECTORS, OPTICAL AND MICROMACHINED COMPONENTS.
Task order obligations
Estimated months remaining until end of performance.
Period of performance
100% of period elapsed
Awarding Agency
NANATIONAL AERONAUTICS AND SPACE ADMINISTRATION
Code: 8000
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Modification ID | Description | Action Date | Obligated Amount | Action Type |
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Subaward # | Subawardee | Description | Amount | Action Date |
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