| | WAFER GRINDER AND CHEMICAL MECHANICAL POLISHER (CMP) TOOL | AXUS TECHNOLOGY LLC | $569,080 | DEPT OF THE NAVY | DEPT OF THE NAVY | — | 333242Semiconductor Machinery Manufacturing | 3670SPECIALIZED SEMICONDUCTOR, MICROCIRCUIT, AND PRINTED CIRCUIT BOARD MANUFACTURING MACHINERY | Mar 25, 2025 | Mar 25, 2025 | Sep 6, 2025 |
| | PREVENTATIVE MAINTENANCE | AXUS TECHNOLOGY LLC | $19,250 | NATIONAL AERONAUTICS AND SPACE ADMINISTRATION | NATIONAL AERONAUTICS AND SPACE ADMINISTRATION | — | 333242Semiconductor Machinery Manufacturing | R499SUPPORT- PROFESSIONAL: OTHER | Nov 28, 2023 | Nov 30, 2023 | Jan 1, 2026 |
| | CHEMICAL MECHANICAL PLANARIZATION SYSTEM | AXUS TECHNOLOGY LLC | $476,000 | NATIONAL AERONAUTICS AND SPACE ADMINISTRATION | NATIONAL AERONAUTICS AND SPACE ADMINISTRATION | — | 333242Semiconductor Machinery Manufacturing | 3670SPECIALIZED SEMICONDUCTOR, MICROCIRCUIT, AND PRINTED CIRCUIT BOARD MANUFACTURING MACHINERY | Jun 24, 2020 | Jun 24, 2020 | Aug 23, 2021 |
| | PROCESS TECHNOLOGY TRANSFER FOR SIN CMP PROCESS DETAILS AND 472 TOOL RECIPE FOR NIST PML | AXUS TECHNOLOGY LLC | $5,000 | NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY | NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY | — | 333242Semiconductor Machinery Manufacturing | 6810CHEMICALS | Sep 16, 2018 | Sep 16, 2018 | Nov 24, 2018 |
| | PURCHASE OF A REMANUFACTURED CMP TOOL | AXUS TECHNOLOGY LLC | $340,684 | NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY | NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY | — | 333242Semiconductor Machinery Manufacturing | 3695MISCELLANEOUS SPECIAL INDUSTRY MACHINERY | Mar 28, 2017 | Mar 28, 2017 | Jul 31, 2017 |
| | IGF::OT::IGF CHEMICAL MECHANICAL POLISH OF SUBSTRATES | AXUS TECHNOLOGY LLC | $24,055 | DEPT OF THE ARMY | DEPT OF THE ARMY | — | 333242Semiconductor Machinery Manufacturing | 3670SPECIALIZED SEMICONDUCTOR, MICROCIRCUIT, AND PRINTED CIRCUIT BOARD MANUFACTURING MACHINERY | Mar 13, 2017 | Mar 13, 2017 | Sep 29, 2019 |
| | POST CMP WAFER CLEANER | AXUS TECHNOLOGY LLC | $176,046 | NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY | NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY | — | 334516Analytical Laboratory Instrument Manufacturing | 6640LABORATORY EQUIPMENT AND SUPPLIES | Feb 28, 2017 | Feb 28, 2017 | Jul 31, 2017 |
| | IGF::OT::IGF CHEMICAL MECHANICAL POLISHING (CMP) | AXUS TECHNOLOGY LLC | $12,301 | DEPT OF THE ARMY | DEPT OF THE ARMY | — | 333242Semiconductor Machinery Manufacturing | 3670SPECIALIZED SEMICONDUCTOR, MICROCIRCUIT, AND PRINTED CIRCUIT BOARD MANUFACTURING MACHINERY | Sep 28, 2016 | Sep 28, 2016 | May 1, 2017 |
| | IGF::OT::IGF CHEMICAL MECHANICAL POLISHING (CMP) | AXUS TECHNOLOGY LLC | $5,370 | DEPT OF THE ARMY | DEPT OF THE ARMY | — | 333242Semiconductor Machinery Manufacturing | 3670SPECIALIZED SEMICONDUCTOR, MICROCIRCUIT, AND PRINTED CIRCUIT BOARD MANUFACTURING MACHINERY | Sep 30, 2015 | Sep 30, 2015 | Dec 4, 2015 |
| | PURCHASE OF A CHEMICAL MECHANICAL POLISHING TOOL | AXUS TECHNOLOGY LLC | $202,000 | NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY | NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY | — | 334413Semiconductor and Related Device Manufacturing | 6640LABORATORY EQUIPMENT AND SUPPLIES | Aug 7, 2015 | Aug 7, 2015 | Nov 13, 2015 |
| | CMP PROCESSING FOR SIGE/SI ON SAPPHIRE | AXUS TECHNOLOGY LLC | $2,530 | NATIONAL AERONAUTICS AND SPACE ADMINISTRATION | — | — | — | 3695MISCELLANEOUS SPECIAL INDUSTRY MACHINERY | Sep 12, 2005 | Sep 12, 2005 | Oct 28, 2005 |