Combined Sources Sought Notice and Notice of Intent to Sole Source for a Silane Distribution System for the Boulder Microfabrication Facility
The National Institute of Standards and Technology (NIST) is conducting market research for a new silane distribution system at the Boulder Microfabrication Facility (BMF) in Colorado. The BMF, a Class 100 microelectronics lab, needs to replace an end-of-life system used for delivering toxic and pyrophoric silane gas. NIST intends to issue a sole-source award to CVD Equipment Corporation to maintain compatibility with the facility's standardized Ciphercon platform and existing Toxic Gas Monitoring System (TGMS). The requirement includes an outdoor gas rack and a specialized gas valve manifold box (VMB). NIST has standardized these systems to ensure a single control interface for emergency response and to maintain a consistent spare parts inventory. This notice seeks to identify other commercial sources capable of meeting these technical and safety requirements. Responses are due by June 6, 2026. The provided documents include a draft Statement of Work and a technical Q&A clarifying flow rates and environmental conditions at the Boulder site. All equipment must be new; refurbished or prototype units are not permitted. NIST has issued a combined Sources Sought and Notice of Intent to Sole Source for a silane distribution system at the Boulder Microfabrication Facility (BMF). The BMF is a Class 100 lab that needs to replace its current silane delivery system to maintain safe operations for toxic and pyrophoric gas delivery. NIST requires a new silane distribution system for the Boulder Micro-Fabrication Facility to replace an aging system. The scope covers the delivery and commissioning of a gas rack and a Valve Manifold Box (VMB) for handling toxic and pyrophoric silane gas.
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Contact and place of performance
Nina Lin
Boulder, CO 80305
USA
6/3/26: Amendment 02: Notice hereby amended to change sole source vendor from CVD Equipment Corporation to Edwards Semiconductor Solutions LLC, which has since acquired Stainless Design Concepts (SDC). 6/1/26 Amendment 01: Notice amended to provide responses to questions received. See attached 'Amendment 01 Q and A 6-1-26.' ***THIS IS A COMBINED SOURCES SOUGHT NOTICE AND NOTICE OF INTENT TO SOLE SOURCE**...
View moreThe NIST BMF has many toxic gases that it uses in the process of making its NIST mission critical devices. Among these gases is silane which, for safety reasons, is sourced out of a single bottle in an outside gas bunker. Further distribution through the BMF requires the use of a Valve Manifold Box (VMB). Due to the life safety hazards associated with the toxic gas systems, the BMF has standardized to the Ciphercon platform to ensure it ensuring operators only need to interact with a single, familiar control interface during high-stress emergencies and allows the BMF to have a stable of spare parts to use for the systems. The BMF currently has an installed base of six SDC Ciphercon 1500 toxic gas cabinets, which are fully integrated into our facility's TGMS. Procuring this replacement directly from Edwards Semiconductor Solutions LLC is the only way to ensure a seamless platform for safe operation and allow for a clean, straightforward integration with the existing TGMS.
NIST conducted market research from March through May 2026 by performing internet searches, reviewing past awards for commissioning of previous systems in the BMF, and speaking with vendors to determine what sources could meet NIST’s minimum requirements. The results of that market research revealed that only SDC, which is owned by Edwards Semiconductor Solutions LLC (UEI: R47AMTNUJ6X4), appears to be capable of meeting NIST’s requirements.
HOW TO RESPOND TO THIS NOTICE
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QUESTIONS REGARDING THIS NOTICE
Questions regarding this notice may be submitted via email to the Primary Point of Contact and the Secondary Point of Contact listed in this notice. Questions should be submitted so that they are received 5 calendar days prior to the response date. If the Contracting Officer determines that providing a written amendment to this notice to document question(s) received would benefit other potential respondents, the questions would be anonymized, and a written response to such question(s) would be provided via an amendment to this notice.
IMPORTANT NOTES
This notice is for market research purposes and should not be construed as a commitment by NIST to issue a solicitation or ultimately award a contract. There is no solicitation available at this time.
This notice does not obligate the Government to award a contract or otherwise pay for the information provided in response.
NIST reserves the right to use information provided by respondents for any purpose deemed necessary and legally appropriate.
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After a review of the responses received, a synopsis and solicitation may be published on GSA’s eBuy or SAM.gov. However, responses to this notice will not be considered an adequate response to any such solicitation(s).
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