Average obligated amount per year since period start.
Portion of total contract value already obligated.
Share of total value represented by subawards.
PECVD IS A COMMON DEPOSITION TECHNIQUE USED IN THE SEMICONDUCTOR INDUSTRY FOR DEPOSITING INSULATING LAYERS A SYSTEM TO DEPOSIT LOW OPTICAL LOSS FILMS.EVIDENCE TO CONTROL THE STOICHIOMETRY&STRESS OF A FILM INDEPENDENTLY BY USING HELIUM DILUTION
Task order obligations
Estimated months remaining until end of performance.
Period of performance
100% of period elapsed
Awarding Agency
NINATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
Code: 1341
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Modification ID | Description | Action Date | Obligated Amount | Action Type |
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Subaward # | Subawardee | Description | Amount | Action Date |
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