PLASMA-THERM HBR-CL SILICON ICP ETCHER AND DRIE SILICON ETCHER PLASMA-THERM LLC $1,411,586 NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY — 333242 Semiconductor Machinery Manufacturing 3424 METAL HEAT TREATING AND NON-THERMAL TREATING EQUIPMENT Aug 9, 2023 Aug 11, 2023 Sep 28, 2028
CHILLER FOR PLASMATHERM VERSALINE ICP SYSTEM AND INSTALLATION/ REPAIR. PLASMA-THERM LLC $54,610 NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY — 333242 Semiconductor Machinery Manufacturing 6640 LABORATORY EQUIPMENT AND SUPPLIES Jul 9, 2021 Jul 9, 2021 Sep 30, 2021
PECVD IS A COMMON DEPOSITION TECHNIQUE USED IN THE SEMICONDUCTOR INDUSTRY FOR DEPOSITING INSULATING LAYERS A SYSTEM TO DEPOSIT LOW OPTICAL LOSS FILMS.EVIDENCE TO CONTROL THE STOICHIOMETRY&STRESS OF A FILM INDEPENDENTLY BY USING HELIUM DILUTION PLASMA-THERM LLC $631,303 NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY — 333242 Semiconductor Machinery Manufacturing 6640 LABORATORY EQUIPMENT AND SUPPLIES Aug 6, 2020 Aug 6, 2020 Apr 2, 2021
LABOR&TRAVEL HOURS PLASMA-THERM LLC $8,325 DEPT OF THE NAVY DEPT OF THE NAVY — 333242 Semiconductor Machinery Manufacturing J099 Jun 8, 2020 Jun 8, 2020 Aug 7, 2020
PURCHASE OF 100MM CLAMPS PLASMA-THERM LLC $7,638 NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY — 333242 Semiconductor Machinery Manufacturing 6810 CHEMICALS Sep 10, 2019 Sep 10, 2019 Oct 11, 2019
REFURBISHED PLASMATHERM 790 REACTIVE ION ETCH (RIE) PLASMA-THERM LLC $244,316 NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY — 333242 Semiconductor Machinery Manufacturing 6640 LABORATORY EQUIPMENT AND SUPPLIES Jun 5, 2019 Jun 5, 2019 Dec 5, 2019
SERVICES TO CONVERT A HDPCVD TOOL FROM A 8 SUBSTRATE TO A 4 SUBSTRATE AND PROVIDE PREVENTATIVE MAINTENANCE ONCE CONVERTED PLASMA-THERM LLC $30,158 NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY — 811219 R425 SUPPORT- PROFESSIONAL: ENGINEERING/TECHNICAL Feb 8, 2019 Feb 8, 2019 May 10, 2019
CONTRACTOR SHALL PROVIDE ALL PARTS AND LABOR TO UPGRADE GAS CHANNEL LINES ON PLASMATHERM 790 RIE SYSTEMS PLASMA-THERM LLC $24,832 NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY — 811219 R425 SUPPORT- PROFESSIONAL: ENGINEERING/TECHNICAL Nov 20, 2018 Nov 20, 2018 Feb 28, 2019
EMERGENCY SERVICE CALL FOR REPAIR OF THE ELECTRODE SYSTEM USED IN THE CNST NANOFAB PLASMA THERM HIGH DENSITY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SYSTEM, SERIAL NUMBER 101019839 PLASMA-THERM LLC $0 NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY — 811219 R425 SUPPORT- PROFESSIONAL: ENGINEERING/TECHNICAL Apr 17, 2018 Apr 17, 2018 May 16, 2018
GAS SYSTEM UPGRADE PLASMA-THERM LLC $20,380 NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY — 333242 Semiconductor Machinery Manufacturing 6640 LABORATORY EQUIPMENT AND SUPPLIES Jun 27, 2017 Jun 27, 2017 Oct 10, 2017
ION SKETCH PLASMATHERM CONTROLLER UPGRADE PLASMA-THERM LLC $197,832 NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY — 333242 Semiconductor Machinery Manufacturing 6640 LABORATORY EQUIPMENT AND SUPPLIES Sep 2, 2015 Sep 2, 2015 Feb 15, 2017
VLN DEEP SILICON ETCHER PLASMA-THERM LLC $149,999 DEPT OF THE ARMY DEPT OF THE ARMY — 333242 Semiconductor Machinery Manufacturing 5961 SEMICONDUCTOR DEVICES AND ASSOCIATED HARDWARE Sep 27, 2014 Sep 27, 2014 Mar 30, 2015
CERAMIC COVER PLATES PLASMA-THERM LLC $8,775 NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY — 333242 Semiconductor Machinery Manufacturing 6640 LABORATORY EQUIPMENT AND SUPPLIES May 27, 2014 May 27, 2014 Oct 15, 2014
REPLACEMENT CERAMIC CLAMPS PLASMA-THERM LLC $9,362 NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY — 333242 Semiconductor Machinery Manufacturing 3670 SPECIALIZED SEMICONDUCTOR, MICROCIRCUIT, AND PRINTED CIRCUIT BOARD MANUFACTURING MACHINERY Aug 26, 2013 Aug 26, 2013 Oct 11, 2016
DRIE PLASMA-THERM LLC $758,746 DEPT OF THE NAVY DEPT OF THE NAVY — 333295 6640 LABORATORY EQUIPMENT AND SUPPLIES Sep 29, 2012 Sep 29, 2012 Feb 28, 2013
HDPECVD TOOL PLASMA-THERM LLC $599,000 NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY — 334516 Analytical Laboratory Instrument Manufacturing 6640 LABORATORY EQUIPMENT AND SUPPLIES Sep 22, 2012 Sep 22, 2012 Apr 30, 2013
TURBO PUMP PLASMA-THERM LLC $24,154 NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY — 334516 Analytical Laboratory Instrument Manufacturing 6640 LABORATORY EQUIPMENT AND SUPPLIES Aug 14, 2012 Aug 14, 2012 Nov 15, 2012
VALVE PLASMA-THERM LLC $6,645 NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY — 334516 Analytical Laboratory Instrument Manufacturing 6640 LABORATORY EQUIPMENT AND SUPPLIES Apr 18, 2012 Apr 18, 2012 Apr 20, 2012
DEEP SILICON ETCHER PLASMA-THERM LLC $885,662 DEPT OF THE ARMY DEPT OF THE ARMY — 333295 6640 LABORATORY EQUIPMENT AND SUPPLIES Feb 22, 2012 Feb 22, 2012 May 21, 2012
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SYSTEM RDRL-SEG PLASMA-THERM LLC $264,064 DEPT OF THE ARMY DEPT OF THE ARMY — 334516 Analytical Laboratory Instrument Manufacturing 6625 ELECTRICAL AND ELECTRONIC PROPERTIES MEASURING AND TESTING INSTRUMENTS Sep 26, 2011 Sep 26, 2011 Dec 2, 2011
PLASMA THERM MAINTENANCE PLASMA-THERM LLC $172,800 DEPT OF THE ARMY DEPT OF THE ARMY — 333295 5961 SEMICONDUCTOR DEVICES AND ASSOCIATED HARDWARE Sep 22, 2011 Sep 22, 2011 Aug 28, 2014
NM-SP-VLRE PLASMA-THERM LLC $10,100 DEPT OF THE ARMY DEPT OF THE ARMY — 333295 5961 SEMICONDUCTOR DEVICES AND ASSOCIATED HARDWARE Aug 10, 2011 Aug 10, 2011 Sep 12, 2011
HIGH RATE SILICON DIOXIDE DEEP REACTIVE ION ETCHER SYSTEM PLASMA-THERM LLC $540,500 NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY — 334516 Analytical Laboratory Instrument Manufacturing 6640 LABORATORY EQUIPMENT AND SUPPLIES Sep 23, 2010 Sep 23, 2010 Nov 29, 2016
VOLTAGE PROBE PLASMA-THERM LLC $4,125 DEPT OF THE ARMY DEPT OF THE ARMY — 334516 Analytical Laboratory Instrument Manufacturing 6625 ELECTRICAL AND ELECTRONIC PROPERTIES MEASURING AND TESTING INSTRUMENTS Apr 27, 2010 Apr 27, 2010 May 18, 2010
REPLACEMENT CERAMIC CLAMPS AND PLUGS FOR AN OERLIKON VERSALOCK VLR700 ETCH CHAMBER AND FOR AN OERLIKON SLR770 ETCH CHAMBER PLASMA-THERM LLC $6,748 DEPT OF THE ARMY DEPT OF THE ARMY — 333295 5961 SEMICONDUCTOR DEVICES AND ASSOCIATED HARDWARE Apr 14, 2010 Apr 14, 2010 Apr 30, 2010