Average obligated amount per year since period start.
Portion of total contract value already obligated.
Share of total value represented by subawards.
PLASMA-THERM HBR-CL SILICON ICP ETCHER AND DRIE SILICON ETCHER
Task order obligations
Estimated months remaining until end of performance.
Period of performance
55% of period elapsed
Awarding Agency
NINATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
Code: 1341
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Modification ID | Description | Action Date | Obligated Amount | Action Type |
|---|---|---|---|---|
Subaward # | Subawardee | Description | Amount | Action Date |
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