Inductively Coupled Etching System

Argonne National Laboratory, a Department of Energy contractor, is soliciting quotations for the procurement of an Inductively Coupled Etching System. This acquisition supports the Q-NEXT initiative and requires the delivery of a system that meets all technical specifications detailed in the associated Statement of Work. The laboratory will evaluate submissions and issue an award based on the lowest price, technically acceptable (LPTA) offer. This procurement is classified under NAICS 333242, Semiconductor Machinery Manufacturing, and PSC 6640, Laboratory Equipment and Supplies.

Vendors are required to submit a completed Request for Quotation including pricing, supporting technical evidence to demonstrate compliance with the Statement of Work, and completed representations and certifications. The solicitation includes six attachments, such as the Statement of Work, quality assurance procurement requirements, and on-site modification risk documentation, all published on May 15, 2026.

Molly Hunter serves as the point of contact for this solicitation under notice number 6-S176-Q-00231-00. All responses must be submitted by 5:00 p.m. CDT on May 26, 2026. The place of performance for this requirement is Argonne National Laboratory in Illinois.