Inductively Coupled Etching System

Argonne National Laboratory, a Department of Energy contractor, is soliciting quotations for an Inductively Coupled Etching System to be utilized at its facility in Illinois. This procurement, identified by solicitation number 6-S176-Q-00231-00, requires the delivery of equipment that adheres to the specifications outlined in the Statement of Work titled “Q-NEXT Inductively Coupled Etching System,” dated April 27, 2026. The contract is classified under NAICS 333242, Semiconductor Machinery Manufacturing, and PSC 6640, Laboratory Equipment and Supplies.

The laboratory will award the contract on a Lowest Price, Technically Acceptable (LPTA) basis. Vendors are required to submit a completed ANL-70 Request for Quotation featuring pricing and supporting technical evidence, along with a completed ANL-70B Representations and Certifications. Documentation must provide sufficient detail to demonstrate that the proposed system meets all technical requirements specified in the Statement of Work.

Responses for this solicitation are due by 5:00 p.m. CDT on May 26, 2026. The procurement package includes six attachments: the Statement of Work, an on-site modification risk document, Appendix A-71COM, quality assurance procurement requirements, Representations and Certifications, and the Request for Quotation form. Molly Hunter serves as the point of contact for this requirement.